Physics and Astronomy Classification Scheme 2003
81.15.-z
Methods of deposition of films and coatings; film growth and epitaxy (for structure of thin films, see 68.55.-a; see also 85.40.Sz
( 1 Dok. )
81.15.Aa
Theory and models of film growth
( 1 Dok. )
81.15.Cd
Deposition by sputtering
( 0 Dok. )
81.15.Ef
Vacuum deposition
( 0 Dok. )
81.15.Fg
Laser deposition
( 0 Dok. )
81.15.Gh
Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, etc.) (for chemistry of MOCVD, see 82.33.Ya in physical chemistry and chemical physics)
( 2 Dok. )
81.15.Hi
Molecular, atomic, ion, and chemical beam epitaxy
( 0 Dok. )
81.15.Jj
Ion and electron beam-assisted deposition; ion plating (see also 52.77.Dq
( 1 Dok. )
81.15.Kk
Vapor phase epitaxy; growth from vapor phase
( 0 Dok. )
81.15.Lm
Liquid phase epitaxy; deposition from liquid phases (melts, solutions, and surface layers on liquids)
( 0 Dok. )
81.15.Np
Solid phase epitaxy; growth from solid phases
( 0 Dok. )
81.15.Pq
Electrodeposition, electroplating
( 0 Dok. )
81.15.Rs
Spray coating techniques
( 0 Dok. )
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Letzte Änderung: 14.07.10